Oxford 90 Plus Ion Etcher

  • 6000.00 £
  • Published date: September 4, 2018
    • Loughborough, Leicestershire, United Kingdom

Oxford 90 Plus Ion Etcher


⭕ Oxford 90 Plus Reactive Ion Etcher - RIE with Load Lock
Reactive Ion Etcher with manual load Load lock
6 MFCs (BCl3, Cl2, CH4, H2, Ar, O2)
Pfeiffer Turbo TPH330PC and turbo controller on the Main chamber
Pfeiffer Turbo TMH 260C on the Load Lock
Advanced Energy RFX600 RF 600 Watt power supply

Phone number ✆ 07911 243822
Loughborough, Leicestershire




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